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SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Dynamically tuned vibratory micromechanical gyroscope accelerometer

✍ Scribed by Lee, Byeungleul; Oh, Yong-Soo; Park, Kyu-Yeon; Ha, Byeoungju; Ko, Younil; Kim, Jeong-gon; Kang, Seokjin; Choi, Sangon; Song, Ci M.; Hariz, Alex; Varadan, Vijay K.; Reinhold, Olaf

Book ID: 115546880
Publisher: SPIE
Year: 1997
Weight: 871 KB
Volume: 3242
Category: Article
DOI: 10.1117/12.293580

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