✦ LIBER ✦

SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology

✍ Scribed by Kim, Myung Gyoo; Park, Jaehee; Kang, Shin-Won; Sohn, Byung-Ki; Hariz, Alex; Varadan, Vijay K.; Reinhold, Olaf

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Far East and Paci

✍ Lee, Byeungleul; Oh, Yong-Soo; Park, Kyu-Yeon; Ha, Byeoungju; Ko, Younil; Kim, J 📂 Article 📅 1997 🏛 SPIE ⚖ 871 KB

SPIE Proceedings [SPIE Far East and Paci

✍ Minami, Tadatsugu; Yamada, Hiroyuki; Kubota, Yoshihiro; Miyata, Toshihiro; Hariz 📂 Article 📅 1997 🏛 SPIE ⚖ 564 KB

SPIE Proceedings [SPIE Far East and Paci

✍ Lee, Soon S.; Lim, Sungkyoo; Sun, Sey-Shing; Wager, John F.; Hariz, Alex; Varada 📂 Article 📅 1997 🏛 SPIE ⚖ 197 KB

SPIE Proceedings [SPIE Far East and Paci

✍ Kwok, Chee Y.; Puzzer, Tom; Lin, Kwang M.; Haji-Babaei, Jafar; Hariz, Alex; Vara 📂 Article 📅 1997 🏛 SPIE ⚖ 805 KB

SPIE Proceedings [SPIE Far East and Paci

✍ Zou, Qiang; Zhang, Shoubai; Cai, Bingchu; Wang, Xiaodong; Hariz, Alex; Varadan, 📂 Article 📅 1997 🏛 SPIE ⚖ 464 KB