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SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology

โœ Scribed by Kim, Myung Gyoo; Park, Jaehee; Kang, Shin-Won; Sohn, Byung-Ki; Hariz, Alex; Varadan, Vijay K.; Reinhold, Olaf


Book ID
121322392
Publisher
SPIE
Year
1997
Weight
238 KB
Volume
3242
Category
Article

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