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Spectroscopic ellipsometry study of CVD molybdenum oxide films: effect of temperature

✍ Scribed by Anna Szekeres; Tatyana Ivanova; Kostadinka Gesheva

Book ID: 106243172
Publisher: Springer
Year: 2002
Tongue: English
Weight: 260 KB
Volume: 7
Category: Article
ISSN: 1432-8488
DOI: 10.1007/s10008-002-0285-4

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