Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data
Spectroscopic Ellipsometry: Principles and Applications
โ Scribed by Hiroyuki Fujiwara
- Year
- 2007
- Tongue
- English
- Leaves
- 388
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Bridging the gap between laser physics and applied mathematics, this book offers a new perspective on laser dynamics. Combining fresh treatments of classic problems with up-to-date research, asymptotic techniques appropriate for nonlinear dynamical systems are shown to offer a powerful alternative t
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced i
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