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Spectroscopic ellipsometry for in-line process control of SiGe:C HBT technology

✍ Scribed by O. Fursenko; J. Bauer; P. Zaumseil; D. Krüger; A. Goryachko; Y. Yamamoto; K. Köpke; B. Tillack

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
346 KB
Volume
8
Category
Article
ISSN
1369-8001

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