✦ LIBER ✦
Thermodynamic analysis of the gas-transport process in the system SiI for the case of silicon film growth in an open system: V N Romanenko and S A Vasilevskiy, Electronic Technology, Scient Techn Collect, Control of Quality and Standardization, No 4, 1971, 41–45 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 168 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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