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Spectroscopic ellipsometry for depth profiling of ion implanted materials

✍ Scribed by J. Vanhellemont; Ph. Roussel; H.E. Maes

Book ID: 113282376
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 499 KB
Volume: 55
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)96158-h

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