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Spectroscopic ellipsometry characterization of Ba0.7Sr0.3TiO3 thin films prepared by the sol-gel method

✍ Scribed by Iwao Suzuki; Masahiro Ejima; Kenichi Watanabe; Yi-Ming Xiong; Tadashi Saitoh

Book ID: 114086312
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 168 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00820-1

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Stoichiometric Ba x Sr 1Àx TiO 3 (BST) thin films with various values of x were prepared on Si(100) substrates by the sol-gel method. The influence of Sr content on the structure and the optical properties was studied by X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) in the UV-visible r