Characterization of NH3 plasma-treated Ba0.7Sr0.3TiO3 thin films
β Scribed by D.S Wuu; R.H Horng; F.C Liao; C.C Leu; T.Y Huang; S.M Sze; H.Y Chen; C.Y Chang
- Book ID
- 108362491
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 373 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
Mechanical properties and surface characterizations of Ba 0.7 Sr 0.3 TiO 3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved
Interdigitated capacitors haΒ¨e been fabricated on ferroelectric thin films of Sr Ba TiO . These deΒ¨ices haΒ¨e been characterized 0 .5 0 .5 3 at microwaΒ¨e frequencies from 50 MHz to 20 GHz, and haΒ¨e a 3.4:1 tuning range oΒ¨er a 1α40 V bias range. This is shown to originate from a relatiΒ¨e dielectric co