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Effects of O2 plasma treatment on the electric and dielectric characteristics of Ba0.7Sr0.3TiO3 thin films

โœ Scribed by Ching-Chich Leu; Shih-Hsiung Chan; Haur-Ywh Chen; Ray-Hua Horng; Dong-Sing Wuu; Luh-Huei Wu; Tiao-Yuan Huang; Chun-Yen Chang; Simon Min Sze

Book ID
108362494
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
200 KB
Volume
40
Category
Article
ISSN
0026-2714

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Mechanical properties and surface characterizations of Ba 0.7 Sr 0.3 TiO 3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved