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Microstructure and electrical characteristics of Ba0.65Sr0.35TiO3 thin films etched in CF4/Ar/O2 plasma

✍ Scribed by Zuci Quan; Sheng Xu; Hao Hu; Wei Liu; Huiming Huang; Bobby Sebo; Guojia Fang; Meiya Li; Xingzhong Zhao

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 553 KB
Volume: 85
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2008.07.005

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