Spectroscopic analysis of r.f. plasmas : W. R. Harshbarger and R. A. Porter. Solid St. Technol. p. 99 (April 1978)

• Book ID: 103276015
• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 248 KB
• Volume: 18
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(78)90313-x