Applications of reactive plasma practical microelectronic processing systems : R. L. Maddox and H. L. Parker. Solid St. Technol. p. 107 (April 1978)

• Book ID: 103276014
• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 127 KB
• Volume: 18
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(78)90312-8