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Specific features of etching of the (001) surface of single-crystalline silicon in KOH-based solutions

✍ Scribed by E. A. Khizhnyak; A. V. Yukhnevich

Book ID
111459339
Publisher
Springer
Year
2007
Tongue
English
Weight
111 KB
Volume
77
Category
Article
ISSN
1070-3632

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