✦ LIBER ✦
Some features of a microdefect revealing in single-crystal silicon by the preferential etching technique
✍ Scribed by Alexandra E. Usenka; Anatolii V. Yukhnevich
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 292 KB
- Volume
- 404
- Category
- Article
- ISSN
- 0921-4526
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