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Spatially Resolved Thermal Conductivity Measurements Using a Thermoreflectance Microprobe

✍ Scribed by Neubrand, A.; Dadda, J.; Mueller, E.; Perlt, S.; Höche, T.

Book ID
120486976
Publisher
Springer US
Year
2013
Tongue
English
Weight
603 KB
Volume
42
Category
Article
ISSN
0361-5235

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The thermal conductivity of low-dielectric-constant (low-k) materials has been studied by a nano second thermoreflectance measurement system (Nano-TheMS). The Nano-TheMS, which utilizes thermoreflectance, can easily measure the thermal conductivity of thin film of nano-meter scale thickness. We have