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Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma

✍ Scribed by Michael D Whitfield; Richard B Jackman; J.S Foord


Book ID
108390546
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
516 KB
Volume
56
Category
Article
ISSN
0042-207X

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