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Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

✍ Scribed by Chen, Yu; Guo, Zhi-Gang; Zhu, Xi-Ming; Mao, Zhi-Guo; Pu, Yi-Kang

Book ID: 120183579
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 202 KB
Volume: 40
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/40/17/017

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