Spatially resolved atomic excitation temperatures in CH 4 /H 2 and C 3 H 8 /H 2 RF discharges by optical emission spectroscopy

✍ Scribed by Chingsungnoen, A; Wilson, J I B; Amornkitbamrung, V; Thomas, C; Burinprakhon, T

• Book ID: 120000270
• Publisher: Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 679 KB
• Volume: 16
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/16/3/002