Temperature and population measurements of n = 2 hydrogen atoms in H2RF discharges from Hα (Balmer) spectral profiles obtained by intracavity laser spectroscopy

Hα (Balmer) spectral profiles obtained f

Hα (Balmer) spectral profiles obtained from H2 rf plasma discharges studied by intracavity laser spectroscopy

✍ Magnus J. Lipp; James J. O'Brien 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 457 KB

H, (Balmer) spectral absorption profiles are obtained for 13.56 MHz rfdischarges of hydrogen at pressures from 25 mTorr to 3.0 Torr. The H, transitions are monitored by intracavity laser spectroscopy using high spectral resolution. Spatially resolved concentrations of atomic hydrogen in the n = 2 st