Hα (Balmer) spectral profiles obtained from H2 rf plasma discharges studied by intracavity laser spectroscopy
✍ Scribed by Magnus J. Lipp; James J. O'Brien
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 457 KB
- Volume
- 227
- Category
- Article
- ISSN
- 0009-2614
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✦ Synopsis
H, (Balmer) spectral absorption profiles are obtained for 13.56 MHz rfdischarges of hydrogen at pressures from 25 mTorr to 3.0 Torr. The H, transitions are monitored by intracavity laser spectroscopy using high spectral resolution. Spatially resolved concentrations of atomic hydrogen in the n = 2 state (H') are measured across the region between the power and ground electrode. The H* density distribution follows the Slow space. The electron densities are (l-3) x 10" cme3. The profiles indicate that the 2S,,a and 2P,,2 states are populated first in the discharges. The system is not in thermodynamic equilibrium but comes closer to it at pressures greater than 500 mTorr.