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Spatial profile of deposited energy by the sputtered flux in a glow discharge

✍ Scribed by JC Moreno-Marín; I Abril; R Garcia-Molina; AMC Pérez-Martín; JJ Jiménez-Rodríguez

Book ID
108390363
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
387 KB
Volume
48
Category
Article
ISSN
0042-207X

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Conversion of sputtering time into depth
Conversion of sputtering time into depth in depth profiles of oxidized CuNi alloys obtained by glow discharge spectroscopy
✍ Kouichi Tsuji; Kichinosuke Hirokawa 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 299 KB

## Abstract Depth analyses of oxidized Cu–Ni alloys were performed in the constant voltage mode by glow discharge optical emission spectroscopy. A Cu‐rich oxide was segregated on the surface of Cu–Ni oxidized layer and, moreover, the discharge current varied strongly with the sputtering time. There