Spatial mapping in the electron-impact ion-source of a residual gas analyser

✍ Scribed by B. Holst; J.R. Buckland; W. Allison

• Book ID: 104266235
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 94 KB
• Volume: 53
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00388-1

✦ Synopsis

Experimental measurements of the spatial distribution of ionisation efficiency in a residual gas analyser (RGA) are presented. The efficiency was determined by scanning a focused helium-atom micro-probe across the active volume of the source. The spatial resolution is determined by the diameter of the focused atom beam, which was approximately 200 m. The results give a direct explanation of the role of ion energy in the overall sensitivity of quadrupole RGA instruments. 1999 Elsevier Science Ltd. All rights reserved.