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Space-charge influenced-injection model for conduction in Pb(ZrxTi1-x)O3 thin films

✍ Scribed by Stolichnov, I.; Tagantsev, A.


Book ID
118120657
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
423 KB
Volume
84
Category
Article
ISSN
0021-8979

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The etching of Pb(Zr Ti )O (PZT) thin films was performed using HBr /Ar gas in an inductively coupled plasma. The etch rate and etch profile of the PZT films were investigated as a function of the gas concentration of the HBr /Ar mixture. In addition, the etch parameters, including coil power, dc b