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Electrode contacts on ferroelectric Pb(ZrxTi1-x)O3 and SrBi2Ta2O9 thin films and their influence on fatigue properties

โœ Scribed by Lee, J. J.; Thio, C. L.; Desu, S. B.

Book ID
115315004
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
880 KB
Volume
78
Category
Article
ISSN
0021-8979

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## ลฝ . ลฝ . ลฝ . We have grown thin Pb Zr Ti O PZT films on PtrSiO rSi substrates by pulsed laser ablation PLA and x 1yx 3 2 ลฝ . subsequent rapid thermal annealing RTA . X-ray diffraction analysis showed that the crystallographic orientation of PZT ลฝ . films after RTA clearly depended on the micros