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Space charge and electret behaviour in anodic Ta2O5 films

✍ Scribed by I. Montero; J.M. Albella; C. Ortega; J. Siejka

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
388 KB
Volume
167
Category
Article
ISSN
0040-6090

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The breakdown damage during the anodic oxidation of tantalum has been studied through reanodization experiments. The results have been interpreted assuming the formation of non-shorting pores oroduced as a conseauence of the breakdown orocess. On the basis of this model, the extent of the damaged ar