Pore formation during the breakdown process in anodic Ta2O5 films

✍ Scribed by I. Montero; M. Fernández; J.M. Albella

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 358 KB
• Volume: 32
• Category: Article
• ISSN: 0013-4686
• DOI: 10.1016/0013-4686(87)87028-7

✦ Synopsis

The breakdown damage during the anodic oxidation of tantalum has been studied through reanodization experiments. The results have been interpreted assuming the formation of non-shorting pores oroduced as a conseauence of the breakdown orocess. On the basis of this model, the extent of the damaged area and the pore depth has been assessed.