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Space- and surface-charge behavior analysis of plasma-preprocessed dielectric thin films

✍ Scribed by Takashima, K.; Oda, T.

Book ID: 117864677
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 98 KB
Volume: 35
Category: Article
ISSN: 0093-9994
DOI: 10.1109/28.793384

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