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Some properties of plasma-polymerized hexamethyldisilazane

✍ Scribed by Z Novotný; H Biederman

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 158 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90087-0

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