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Wettability studies of plasma-polymerized hexamethyldisilazane

✍ Scribed by N. K. Eib; K. L. Mittal; A. Friedrichs


Publisher
John Wiley and Sons
Year
1980
Tongue
English
Weight
189 KB
Volume
25
Category
Article
ISSN
0021-8995

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Methane and fluoromethanes (CH n F 4-n , 1 Υ… n Υ… 3) were subjected to an rf glow discharge plasma. All the fluoromethanes (including methane) polymerized in the plasma and formed thin films. The deposition rate of the fluoromethanes depended on their monomer structure: CH 2 F 2 , of which the F/H ra