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Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon

✍ Scribed by Jiwang Yan; Katsuo Syoji; Jun’ichi Tamaki


Book ID
108390800
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
422 KB
Volume
255
Category
Article
ISSN
0043-1648

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