Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon—a simulation and experimental study

✍ Scribed by Wang, Minghai; Wang, Wei; Lu, Zesheng

• Book ID: 113020502
• Publisher: Springer
• Year: 2011
• Tongue: English
• Weight: 975 KB
• Volume: 60
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-011-3633-7