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Solution-Processed HafSOx and ZircSOx Inorganic Thin-Film Dielectrics and Nanolaminates

✍ Scribed by J. T. Anderson; C. L. Munsee; C. M. Hung; T. M. Phung; G. S. Herman; D. C. Johnson; J. F. Wager; D. A. Keszler

Book ID: 102688828
Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 672 KB
Volume: 17
Category: Article
ISSN: 1616-301X
DOI: 10.1002/adfm.200601135

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