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Sol–gel ZrO2 and ZrO2–Al2O3 nanocrystalline thin films on Si as high-k dielectrics

✍ Scribed by P. Vitanov; A. Harizanova; T. Ivanova; Ch. Trapalis; N. Todorova

Book ID: 108215679
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 602 KB
Volume: 165
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2009.09.002

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