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Sol–gel deposited ceria thin films as gate dielectric for CMOS technology

✍ Scribed by ANIL G KHAIRNAR, ASHOK M MAHAJAN

Book ID: 120899912
Publisher: Springer-Verlag
Year: 2013
Tongue: English
Weight: 316 KB
Volume: 36
Category: Article
ISSN: 0250-4707
DOI: 10.1007/s12034-013-0458-z

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