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Solar blind detectors based on AlGaN grown on sapphire

✍ Scribed by Jean-Yves Duboz; Nicolas Grandjean; Franck Omnès; Jean-Luc Reverchon; Mauro Mosca


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
176 KB
Volume
2
Category
Article
ISSN
1862-6351

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AlGaN-based resonant cavity-enhanced ultraviolet metal-semiconductor-metal photodetectors (PDs) were grown on sapphire substrates without metalorganic chemical vapor deposition (MOCVD)-grown GaN templates by radio frequency plasma-assisted molecular beam epitaxy (RF-MBE). In the resonant cavity-enha