✦ LIBER ✦

Soft X-ray lithography of high aspect ratio SU8 submicron structures

✍ Scribed by Elena Reznikova; Juergen Mohr; Martin Boerner; Vladimir Nazmov; Peter-Juergen Jakobs

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

X-ray lithography for devices with high

✍ Timo Mappes; Sven Achenbach; Juergen Mohr 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 825 KB

Fabrication of Fresnel zone plates with

✍ Longhua Liu; Gang Liu; Ying Xiong; Jie Chen; Chunlei Kang; Xinlong Huang; Yangch 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 337 KB

100 keV electron beam lithography proces

✍ R. Broßardt; F. Go¨tz; B. Rapp 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 921 KB

High throughput projection UV lithograph

✍ Ren Yang; Chuck Mullen; Mark Schaline; Karl Reithmaier; Ron Sheets 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 523 KB

Deep sub micron high aspect ratio polyme

✍ S. Achenbach 📂 Article 📅 2004 🏛 Springer-Verlag 🌐 English ⚖ 358 KB

Submicron-scale surface acoustic wave re

✍ Sven Achenbach; David Klymyshyn; Timo Mappes; Anton Kachayev; Venkat Subramanian 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 288 KB