X-ray lithography for devices with high aspect ratio polymer submicron structures

✍ Scribed by Timo Mappes; Sven Achenbach; Juergen Mohr

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 825 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.154