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Site control of metal dot structures on fluoride surface by electron beam exposure

✍ Scribed by Kazuo Tsutsui; Kazuya Uejima; Koji Kawasaki

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 261 KB
Volume: 227
Category: Article
ISSN: 0921-4526
DOI: 10.1016/0921-4526(96)00426-7

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