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Fabrication of site-controlled metal dot array by electron beam surface modification

โœ Scribed by K. Tsutsui; K. Uejima; K. Kawasaki

Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
281 KB
Volume
35
Category
Article
ISSN
0167-9317

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โœ S. Ohkouchi; Y. Sugimoto; N. Ozaki; H. Ishikawa; K. Asakawa ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 388 KB

We have demonstrated the selective area growth of self-assembled InAs quantum dots (QDs) in the desired regions by using a template composed of InAs QD arrays. These InAs QDs were fabricated by the use of a specially designed atomic force microscope cantilever, referred to as the Nano-Jet Probe (NJP