Si–SiO2 interface formation in low-dose low-energy separation by implanted oxygen materials

✍ Scribed by Tula Jutarosaga; Srinivas Manne; Supapan Seraphin

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 571 KB
• Volume: 250
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2004.12.045