✦ LIBER ✦

Low energy, oxygen dose optimization for thin film separation by implanted oxygen

✍ Scribed by A.K. Robinson; Y. Li; C.D. Marsh; R.J. Chater; P.L.F. Hemment; J.A. Kilner; G.R. Booker

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 582 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90256-9

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Si–SiO2 interface formation in low-dose

Si–SiO2 interface formation in low-dose low-energy separation by implanted oxygen materials

✍ Tula Jutarosaga; Srinivas Manne; Supapan Seraphin 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 571 KB

High-dose oxygen implantation of multila

High-dose oxygen implantation of multilayered thin films for the formation of high-temperature superconductors: A feasibility study

✍ D.A. Lilienfeld; P. Børgesen 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 567 KB

A high-dose ion implantation technique for the formation of high-temperature superconducting thin films on silicon substrates is investigated. This technique consists of three steps: (1) deposition of a multilayer sample of the appropriate composition, (2) implantation of oxygen to mix the layers an

Formation of thin SiO2 films by high dos

Formation of thin SiO2 films by high dose oxygen ion implantation into silicon and their investigation by IR techniques

✍ J. Dylewski; M.C. Joshi 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 557 KB

The dielectric breakdown properties and

The dielectric breakdown properties and I–V characteristics of thin SiO2 films formed by high dose oxygen ion implantation into silicon

✍ J. Dylewski; M.C. Joshi 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 544 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB