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SiO2 deposition as a byproduct of SF6 plasma in an electron cyclotron resonance reactor

✍ Scribed by A.J. Watts; W.J. Varhue; M.L. Gibson

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 397 KB
Volume: 220
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90548-p

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