Single-chamber plasma enhanced chemical vapor deposition of transparent organic/inorganic multilayer barrier coating at low temperature

✍ Scribed by S. M. Park; D. J. Kim; S. I. Kim; N. Lee

• Book ID: 121850122
• Publisher: AVS (American Vacuum Society)
• Year: 2008
• Tongue: English
• Weight: 971 KB
• Volume: 26
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.2940348