The preparation of organic light-emitting diode encapsulation barrier layer by low-temperature plasma-enhanced chemical vapor deposition: a study on the\(\hbox {SiO}_\mathrm{x}\hbox {N}_\mathrm{y}\)film parameter optimization

✍ Scribed by Kuo, Chung-Feng Jeffrey; Lan, Wei-Lun; Chang, Yu-Cheng; Lin, Kun-Wei

• Book ID: 125362579
• Publisher: Springer US
• Year: 2014
• Tongue: English
• Weight: 594 KB
• Volume: 27
• Category: Article
• ISSN: 0956-5515
• DOI: 10.1007/s10845-014-0893-8