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Single and double buried epitaxial metallic layers in Si prepared by ion implantation

✍ Scribed by A. Vantomme; M.F. Wu; G. Langouche

Book ID: 113282663
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 760 KB
Volume: 63
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95182-q

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