✦ LIBER ✦

Preparing buried Si3N4layers by high-intensity ion implantation and rapid thermal annealing

✍ Scribed by V. V. Gribkovskii; R. V. Gribkovskii; F. F. Komarov; G. V. Litvinovich; A. P. Novikov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Buried Si3N4 layers in silicon produced

✍ R.V. Gribkovskii; F.F. Komarov; A.P. Novikov 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 201 KB

The formation of buried Si3N4 layers in

✍ U. Kreissig; W. Skorupa; E. Hensel 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 177 KB

Formation of Epitaxial NiSi2 by High Dos

✍ Petukhov, V. Yu. ;Khaibullin, I. B. ;Zaripov, M. M. ;Wieser, E. ;Grötzschel, R. 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 454 KB

Crystal regrowth of YBCO thin films by i

✍ T.J. Tate; M.J. Lee; Yupu Li; J.A. Kilner; Y.H. Li; C.A. Leach; D. Lacey; A.D. C 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 154 KB

Two Layer Surface Exfoliation on Si3N4/S

✍ Mengkai Li; Zhuo Wang; Changlong Liu; Junqi Liao; Yanyan Shen; Lili Zhang; Bing 📂 Article 📅 2009 🏛 Springer US 🌐 English ⚖ 279 KB

Si3N4 SOI Structures Produced by Nitroge

✍ F. F. Komarov; A. F. Komarov; S. A. Petrov 📂 Article 📅 2002 🏛 Springer 🌐 English ⚖ 39 KB