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Simultaneous preparation of Cr-SiO and NiCr thin film resistors on a single substrate

✍ Scribed by P. Rachnev; Ph. Philippov; D. Parashkevov

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 240 KB
Volume: 143
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90150-1

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