✦ LIBER ✦

Simulation on chemical mechanical polishing using atomic force microscope

✍ Scribed by Atsushi Miyoshi; Hiroyuki Nakagawa; Koei Matsukawa

Book ID: 106184880
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 375 KB
Volume: 11
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0509-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Probing the mechanical stability of prot

Probing the mechanical stability of proteins using the atomic force microscope

✍ Brockwell, D.J. 📂 Article 📅 2007 🏛 Portland Press 🌐 English ⚖ 224 KB

Friction force studies on layered materi

Friction force studies on layered materials using an Atomic Force Microscope

✍ H. Klein; D. Pailharey; Y. Mathey 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 972 KB

Wet-chemical nanoscale patterning of GaA

Wet-chemical nanoscale patterning of GaAs surfaces using atomic force microscope lithography

✍ B. Klehn; S. Skaberna; U. Kunze 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 461 KB

Sub-100 nm V-grooves in GaAs(001) surfaces have been fabricated by patterning a thin photoresist layer with an atomic force microscope (AFM) and subsequent wet-chemical etching. The nanolithography is based on the dynamic ploughing technique. Anisotropic etchants under investigation are bromine-meth

Dynamic plowing nanolithography on polym

Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope

✍ Heyde, M.; Rademann, K.; Cappella, B.; Geuss, M.; Sturm, H.; Spangenberg, T.; Ni 📂 Article 📅 2001 🏛 American Institute of Physics 🌐 English ⚖ 936 KB

Analysis of retaining ring using finite

Analysis of retaining ring using finite element simulation in chemical mechanical polishing process

✍ Ship-Peng Lo; Yeou-Yih Lin; Jen-Ching Huang 📂 Article 📅 2006 🏛 Springer 🌐 English ⚖ 485 KB

Chemical Approach to High-Resolution Pat

Chemical Approach to High-Resolution Patterning on Self-Assembled Monolayers Using Atomic Force Microscope Lithography

✍ Lee, Wonbae; Kim, Eung Ryul; Lee, Haiwon 📂 Article 📅 2002 🏛 American Chemical Society 🌐 English ⚖ 155 KB