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Simulation of microwave plasmas concentrated on the top surface of a diamond substrate with finite thickness

✍ Scribed by Yamada, Hideaki; Chayahara, Akiyoshi; Mokuno, Yoshiaki; Horino, Yuji; Shikata, Shinichi


Book ID
122445850
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
201 KB
Volume
15
Category
Article
ISSN
0925-9635

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